Inventor

LIAO KUAN Y

US6 patents

⚠️ This page may combine multiple inventors who share the name “LIAO KUAN Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUGHES AIRCRAFT CO

4 patents

US4645562AFeb 24, 1987

Double layer photoresist technique for side-wall profile control in plasma etching processes

HUGHES AIRCRAFT CO125 citations94

US5260227ANov 9, 1993

Method of making a self aligned static induction transistor

HUGHES AIRCRAFT CO22 citations91

US4920403AApr 24, 1990

Selective tungsten interconnection for yield enhancement

HUGHES AIRCRAFT CO31 citations91

US4767721AAug 30, 1988

Double layer photoresist process for well self-align and ion implantation masking

HUGHES AIRCRAFT CO22 citations81

CHANG CHEN CHI P

1 patent

US5028564AJul 2, 1991

Edge doping processes for mesa structures in SOS and SOI devices

CHANG CHEN CHI P43 citations90

LIAO KUAN Y

1 patent

US4961822AOct 9, 1990

Fully recessed interconnection scheme with titanium-tungsten and selective CVD tungsten

LIAO KUAN Y27 citations87