Inventor

CHEN WEN-TEN

TW4 patents

⚠️ This page may combine multiple inventors who share the name “CHEN WEN-TEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

3 patents

US6394886B1May 28, 2002

TAIWAN SEMICONDUCTOR MANUFACTO

1 patent

US6272902B1Aug 14, 2001

Method and apparatus for off-line testing a polishing head

TAIWAN SEMICONDUCTOR MANUFACTO25 citations86

CHEN WEN-TEN

TAIWAN SEMICONDUCTOR MFG

Conformal disk holder for CMP pad conditioner

Floor mounted utility box

Contamination prevention system and method

TAIWAN SEMICONDUCTOR MANUFACTO

Method and apparatus for off-line testing a polishing head