Inventor
FAIRLEY CHRISTOPHER R
US18 patents
⚠️ This page may combine multiple inventors who share the name “FAIRLEY CHRISTOPHER R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS6867406B1Mar 15, 2005
Confocal wafer inspection method and apparatus using fly lens arrangement
KLA TENCOR CORP43 citations96
US6816249B2Nov 9, 2004
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
KLA TENCOR CORP49 citations96
US7554655B2Jun 30, 2009
High throughput brightfield/darkfield water inspection system using advanced optical techniques
KLA TENCOR CORP16 citations92
US7109458B2Sep 19, 2006
Confocal wafer depth scanning inspection method
KLA TENCOR CORP15 citations92
US7858911B2Dec 28, 2010
Confocal wafer inspection system and method
KLA TENCOR CORP15 citations89
US7379173B2May 27, 2008
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
KLA TENCOR CORP9 citations84
US7399950B2Jul 15, 2008
Confocal wafer inspection method and apparatus using fly lens arrangement
KLA TENCOR CORP6 citations74
US7522275B2Apr 21, 2009
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
KLA TENCOR CORP1 citations63
US7259844B2Aug 21, 2007
High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
KLA TENCOR CORP2 citations63
ULTRAPOINTE CORP
5 patentsUS5963314AOct 5, 1999
Laser imaging system for inspection and analysis of sub-micron particles
ULTRAPOINTE CORP258 citations98
US5479252ADec 26, 1995
Laser imaging system for inspection and analysis of sub-micron particles
ULTRAPOINTE CORP343 citations98
US5672861ASep 30, 1997
Method and apparatus for automatic focusing of a confocal laser microscope
ULTRAPOINTE CORP163 citations97
US5783814AJul 21, 1998
Method and apparatus for automatically focusing a microscope
ULTRAPOINTE CORP86 citations95
US5557113ASep 17, 1996
Method and structure for generating a surface image of a three dimensional target
ULTRAPOINTE CORP9 citations65
KLA TENCOR TECH CORP
2 patentsUS6288780B1Sep 11, 2001
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
KLA TENCOR TECH CORP207 citations99
US7164475B2Jan 16, 2007
High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
KLA TENCOR TECH CORP17 citations92