Inventor
SUGARMAN MICHAEL N
US15 patents
Patents
15 patentsUS6081414AJun 27, 2000
Apparatus for improved biasing and retaining of a workpiece in a workpiece processing system
APPLIED MATERIALS INC333 citations98
US5656093AAug 12, 1997
Wafer spacing mask for a substrate support chuck and method of fabricating same
APPLIED MATERIALS INC849 citations98
US6582578B1Jun 24, 2003
Method and associated apparatus for tilting a substrate upon entry for metal deposition
APPLIED MATERIALS INC80 citations97
US6469283B1Oct 22, 2002
Method and apparatus for reducing thermal gradients within a substrate support
APPLIED MATERIALS INC112 citations95
US6219219B1Apr 17, 2001
Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system
APPLIED MATERIALS INC63 citations93
US5356486AOct 18, 1994
Combined wafer support and temperature monitoring device
APPLIED MATERIALS INC46 citations93
US6551488B1Apr 22, 2003
Segmenting of processing system into wet and dry areas
APPLIED MATERIALS INC37 citations92
US6406359B1Jun 18, 2002
Apparatus for transferring semiconductor substrates using an input module
APPLIED MATERIALS INC28 citations92
US7513062B2Apr 7, 2009
Single wafer dryer and drying methods
APPLIED MATERIALS INC23 citations91
US7229504B2Jun 12, 2007
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC25 citations91
US6986185B2Jan 17, 2006
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC25 citations91
US7507296B2Mar 24, 2009
Methods and apparatus for determining scrubber brush pressure
APPLIED MATERIALS INC12 citations83
US5567909AOct 22, 1996
Method for supporting a wafer in a combined wafer support and temperature monitoring device
APPLIED MATERIALS INC17 citations79
US5129994AJul 14, 1992
Method and apparatus to inhibit obstruction of optical transmission through semiconductor etch process chamber viewport
APPLIED MATERIALS INC21 citations78
US6291777B1Sep 18, 2001
Conductive feed-through for creating a surface electrode connection within a dielectric body and method of fabricating same
APPLIED MATERIALS INC11 citations74