Inventor
LOKAI PETER
DE20 patents
⚠️ This page may combine multiple inventors who share the name “LOKAI PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAMBDA PHYSIK AG
12 patentsUS6580517B2Jun 17, 2003
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
LAMBDA PHYSIK AG61 citations96
US6608848B2Aug 19, 2003
Method and apparatus for wavelength calibration
LAMBDA PHYSIK AG14 citations92
US6421365B1Jul 16, 2002
Narrow band excimer or molecular fluorine laser having an output coupling interferometer
LAMBDA PHYSIK AG27 citations92
US6272158B1Aug 7, 2001
Method and apparatus for wavelength calibration
LAMBDA PHYSIK AG24 citations92
US6856638B2Feb 15, 2005
Resonator arrangement for bandwidth control
LAMBDA PHYSIK AG20 citations90
US6792023B1Sep 14, 2004
Method and apparatus for reduction of spectral fluctuations
LAMBDA PHYSIK AG13 citations83
US6839375B1Jan 4, 2005
On-line quality control of the key optical components in lithography lasers using laser induced fluorescence
LAMBDA PHYSIK AG13 citations77
US6717973B2Apr 6, 2004
Wavelength and bandwidth monitor for excimer or molecular fluorine laser
LAMBDA PHYSIK AG8 citations74
US6553050B1Apr 22, 2003
Narrow band excimer or molecular fluorine laser having an output coupling interferometer
LAMBDA PHYSIK AG7 citations74
US6516012B2Feb 4, 2003
Narrow band excimer or molecular fluorine laser having an output coupling interferometer
LAMBDA PHYSIK AG8 citations74
US6567451B2May 20, 2003
Narrow band excimer or molecular fluorine laser having an output coupling interferometer
LAMBDA PHYSIK AG2 citations63
US7006541B2Feb 28, 2006
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
LAMBDA PHYSIK AG1 citations52
LAMBDA PHYSIK GMBH
6 patentsUS6160832ADec 12, 2000
Method and apparatus for wavelength calibration
LAMBDA PHYSIK GMBH52 citations96
US5663973ASep 2, 1997
Tunable narrowband source of a coherent radiation
LAMBDA PHYSIK GMBH73 citations94
US5671241ASep 23, 1997
Tunable source of narrowband coherent radiation
LAMBDA PHYSIK GMBH27 citations92
US5659419AAug 19, 1997
Tunable narrowband optical parametrical oscillator
LAMBDA PHYSIK GMBH50 citations92
US5661595AAug 26, 1997
Tunable, optical parametric oscillator
LAMBDA PHYSIK GMBH16 citations73
US5796513AAug 18, 1998
Laser arrangement for generating narrow-band, tunable coherent radiation
LAMBDA PHYSIK GMBH15 citations69