Inventor
HAGA TAKAHIDE
JP6 patents
Patents
6 patentsUS5765800AJun 16, 1998
Vibration damping apparatus
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US5876012AMar 2, 1999
Vibration cancellation apparatus
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US6515388B1Feb 4, 2003
Magnetic levitation control apparatus
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US5793598AAug 11, 1998
Magnetically levitated vibration damping apparatus
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US6437864B1Aug 20, 2002
Stage positioning device
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US6536735B2Mar 25, 2003
Vibration isolating apparatus for table for mounting device sensitive to vibrations and method therefor
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