Inventor

LEE JOW-FENG

TW2 patents

Patents

2 patents

US6682659B1Jan 27, 2004

Method for forming corrosion inhibited conductor layer

TAIWAN SEMICONDUCTOR MFG57 citations91

US6635590B2Oct 21, 2003

Apparatus and method for in-situ removal of polymer residue

TAIWAN SEMICONDUCTOR MFG6 citations55