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Inventor

JAKKARAJU RAJKUMAR

GB10 patents
⚠️ This page may combine multiple inventors who share the name “JAKKARAJU RAJKUMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents
US9583349B2Feb 28, 2017

Lowering tungsten resistivity by replacing titanium nitride with titanium silicon nitride

APPLIED MATERIALS INC17 citations83
US9514933B2Dec 6, 2016

Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition

APPLIED MATERIALS INC3 citations73
US9881787B2Jan 30, 2018

Deposition methods for uniform and conformal hybrid titanium oxide films

APPLIED MATERIALS INC2 citations69
US9461137B1Oct 4, 2016

Tungsten silicide nitride films and methods of formation

APPLIED MATERIALS INC0 citations51
US9162930B2Oct 20, 2015

PVD ALN film with oxygen doping for a low etch rate hardmask film

APPLIED MATERIALS INC0 citations51

TRIKON TECHNOLOGIES LTD

2 patents
US6944922B2Sep 20, 2005

Method of forming an acoustic resonator

TRIKON TECHNOLOGIES LTD13 citations89
US7141913B2Nov 28, 2006

Acoustic resonators

TRIKON TECHNOLOGIES LTD7 citations70

FORD MARK ASHLEY

1 patent
US8585873B2Nov 19, 2013

Methods and apparatus for sputtering

FORD MARK ASHLEY23 citations84

GAO JUWEN

1 patent
US8778797B2Jul 15, 2014

Systems and methods for selective tungsten deposition in vias

GAO JUWEN11 citations83

AVIZA TECHNOLOGIES LTD

1 patent
US7327073B2Feb 5, 2008

Acoustic resonators

AVIZA TECHNOLOGIES LTD8 citations65