Inventor
WONG KAREN
US4 patents
⚠️ This page may combine multiple inventors who share the name “WONG KAREN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOSEL VITELIC INC
3 patentsUS7040958B2May 9, 2006
Torque-based end point detection methods for chemical mechanical polishing tool which uses ceria-based CMP slurry to polish to protective pad layer
MOSEL VITELIC INC14 citations79
US7070484B2Jul 4, 2006
Pad break-in method for chemical mechanical polishing tool which polishes with ceria-based slurry
MOSEL VITELIC INC4 citations57
US6997788B2Feb 14, 2006
Multi-tool, multi-slurry chemical mechanical polishing
MOSEL VITELIC INC5 citations57