Inventor
UTAMURA SHINJI
JP7 patents
Patents
7 patentsUS5925887AJul 20, 1999
Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same
CANON KK50 citations92
US6980872B2Dec 27, 2005
Information providing method and system
CANON KK25 citations89
US4881100ANov 14, 1989
Alignment method
CANON KK7 citations72
US4811059AMar 7, 1989
Alignment method
CANON KK12 citations72
US5095190AMar 10, 1992
Exposure apparatus
CANON KK17 citations71
US7225041B2May 29, 2007
Information providing method and system
CANON KK2 citations60
US5710624AJan 20, 1998
Aligner and contamination detecting method
CANON KK5 citations60