Inventor
YU HSU-SHENG
TW10 patents
⚠️ This page may combine multiple inventors who share the name “YU HSU-SHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MACRONIX INT CO LTD
8 patentsUS6995095B2Feb 7, 2006
Methods of simultaneously fabricating isolation structures having varying dimensions
MACRONIX INT CO LTD45 citations90
US7244680B2Jul 17, 2007
Method of simultaneously fabricating isolation structures having rounded and unrounded corners
MACRONIX INT CO LTD6 citations71
US9425086B2Aug 23, 2016
Method of controlling contact hole profile for metal fill-in
MACRONIX INT CO LTD2 citations60
US7772670B2Aug 10, 2010
Method of simultaneously fabricating isolation structures having rounded and unrounded corners
MACRONIX INT CO LTD2 citations60
US7648921B2Jan 19, 2010
Method of forming dielectric layer
MACRONIX INT CO LTD3 citations56
US9305840B2Apr 5, 2016
Cluster system for eliminating barrier overhang
MACRONIX INT CO LTD2 citations53
US9449915B2Sep 20, 2016
Semiconductor device and method of manufacturing the same
MACRONIX INT CO LTD1 citations51
US6635579B2Oct 21, 2003
Operating method of a semiconductor etcher
MACRONIX INT CO LTD0 citations51