Inventor

KENBOU YUKIO

JP9 patents

⚠️ This page may combine multiple inventors who share the name “KENBOU YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

2 patents

US7242016B2Jul 10, 2007

Surface inspection apparatus and method thereof

HITACHI HIGH TECH CORP11 citations92

US9551670B2Jan 24, 2017

Surface inspection apparatus and method thereof

HITACHI HIGH TECH CORP0 citations51

HITACHI LTD

2 patents

US7417244B2Aug 26, 2008

Surface inspection apparatus and method thereof

HITACHI LTD9 citations83

US7952085B2May 31, 2011

Surface inspection apparatus and method thereof

HITACHI LTD6 citations73

HITACHI KENKI FINE TECH CO LTD

2 patents

US7350404B2Apr 1, 2008

Scanning type probe microscope and probe moving control method therefor

HITACHI KENKI FINE TECH CO LTD3 citations59

US7388199B2Jun 17, 2008

Probe manufacturing method, probe, and scanning probe microscope

HITACHI KENKI FINE TECH CO LTD5 citations58

HITACHI HIGH TECH ELECT ENG CO

1 patent

US6894302B2May 17, 2005

Surface inspection apparatus and method thereof

HITACHI HIGH TECH ELECT ENG CO35 citations95

HITACHI KENKI FINETECH CO LTD

1 patent

US7333191B2Feb 19, 2008

Scanning probe microscope and measurement method using the same

HITACHI KENKI FINETECH CO LTD11 citations80

ISHIMARU ICHIRO

1 patent

US8729514B2May 20, 2014

Surface inspection apparatus and method thereof

ISHIMARU ICHIRO0 citations49