Inventor

FUKUDA NAOTO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “FUKUDA NAOTO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

3 patents

US7964037B2Jun 21, 2011

Deposition apparatus

CANON KK47 citations92

US12528206B2Jan 20, 2026

Tool stocker, interchangeable tool, robot apparatus, robot system, control method of robot system, and storage medium

CANON KK1 citations62

US9382624B2Jul 5, 2016

Film formation method using oscillators for measurement and calibration during calibration step performed during film formation

CANON KK0 citations50

OTSUKA MANABU

1 patent

US8398774B2Mar 19, 2013

Method of manufacturing organic light emitting device and vapor deposition system

OTSUKA MANABU0 citations36

YOSHIKAWA TOSHIAKI

1 patent

US8062425B2Nov 22, 2011

Vapor deposition system and vapor deposition method

YOSHIKAWA TOSHIAKI0 citations32

FUKUDA NAOTO

1 patent

US9054147B2Jun 9, 2015

Alignment method, alignment apparatus, and organic electroluminescent (EL) element manufacturing apparatus

FUKUDA NAOTO0 citations29