Inventor
SUGAWARA TOSHIFUMI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SUGAWARA TOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CREATIVE TECH CORP
3 patentsUS9866151B2Jan 9, 2018
Electrostatic chuck, glass substrate processing method, and said glass substrate
CREATIVE TECH CORP2 citations70
US9689656B2Jun 27, 2017
Workpiece holder and method using same for detecting lateral displacement of workpiece
CREATIVE TECH CORP1 citations50
US10005087B2Jun 26, 2018
Particle collector system and dust collection method
CREATIVE TECH CORP0 citations39