Inventor
CHU YUAN-CHIH
TW23 patents
⚠️ This page may combine multiple inventors who share the name “CHU YUAN-CHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
16 patentsUS9835940B2Dec 5, 2017
Method to fabricate mask-pellicle system
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations84
US9659768B2May 23, 2017
Focused radiation beam induced thin film deposition
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10061193B2Aug 28, 2018
Focused radiation beam induced deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US9134602B2Sep 15, 2015
Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations62
US10859908B2Dec 8, 2020
Method to fabricate mask-pellicle system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US9664995B2May 30, 2017
Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefrom
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9494855B2Nov 15, 2016
Lithography-oriented photomask repair
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9400424B2Jul 26, 2016
Method of repairing a mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US9952503B2Apr 24, 2018
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations49
US9915866B2Mar 13, 2018
Focused radiation beam induced deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9910350B2Mar 6, 2018
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9810978B2Nov 7, 2017
Method for lithography patterning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9625808B2Apr 18, 2017
Durable metal film deposition for mask repair
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US10816891B2Oct 27, 2020
Photomask and fabrication method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9759998B2Sep 12, 2017
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9395632B2Jul 19, 2016
Efficient solution for removing EUV native defects
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
TAIWAN SEMICONDUCTOR MFG
7 patentsUS8900777B2Dec 2, 2014
Apparatus and method for lithography patterning
TAIWAN SEMICONDUCTOR MFG4 citations72
US9274417B2Mar 1, 2016
Method for lithography patterning
TAIWAN SEMICONDUCTOR MFG3 citations70
US8819859B1Aug 26, 2014
Apparatus of analyzing a sample and a method for the same
TAIWAN SEMICONDUCTOR MFG6 citations70
US8921015B2Dec 30, 2014
Mask repair with passivation
TAIWAN SEMICONDUCTOR MFG4 citations69
US9029050B2May 12, 2015
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG2 citations60
US9298085B2Mar 29, 2016
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG0 citations49
US9291890B2Mar 22, 2016
Method for repairing a mask
TAIWAN SEMICONDUCTOR MFG0 citations49