Inventor
MOMONOI YOSHINORI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “MOMONOI YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
11 patentsUS10714304B2Jul 14, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP8 citations83
US10340115B2Jul 2, 2019
Charged particle beam apparatus
HITACHI HIGH TECH CORP2 citations72
US10186399B2Jan 22, 2019
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US9892887B2Feb 13, 2018
Charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations72
US9472376B2Oct 18, 2016
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US10546715B2Jan 28, 2020
Charged particle beam device
HITACHI HIGH TECH CORP1 citations60
US10438771B2Oct 8, 2019
Measurement device, calibration method of measurement device, and calibration member
HITACHI HIGH TECH CORP0 citations51
US10101150B2Oct 16, 2018
Height measurement device and charged particle beam device
HITACHI HIGH TECH CORP1 citations51
US10217604B2Feb 26, 2019
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations41
US9521372B2Dec 13, 2016
Pattern measuring apparatus, pattern measuring method, and computer-readable recording medium on which a pattern measuring program is recorded
HITACHI HIGH TECH CORP0 citations41
US10665420B2May 26, 2020
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations38
HITACHI LTD
5 patentsUS6551445B1Apr 22, 2003
Plasma processing system and method for manufacturing a semiconductor device by using the same
HITACHI LTD50 citations92
US6475918B1Nov 5, 2002
Plasma treatment apparatus and plasma treatment method
HITACHI LTD24 citations92
US6629538B2Oct 7, 2003
Method for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD14 citations84
US6713401B2Mar 30, 2004
Method for manufacturing semiconductor device
HITACHI LTD12 citations74
US6643893B2Nov 11, 2003
Apparatus for cleaning semiconductor wafers in a vacuum environment
HITACHI LTD10 citations74