Inventor
GELLINEAU ANTONIO
US5 patents
⚠️ This page may combine multiple inventors who share the name “GELLINEAU ANTONIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS10481111B2Nov 19, 2019
Calibration of a small angle X-ray scatterometry based metrology system
KLA TENCOR CORP11 citations81
US11073487B2Jul 27, 2021
Methods and systems for characterization of an x-ray beam with high spatial resolution
KLA TENCOR CORP3 citations71
US10816486B2Oct 27, 2020
Multilayer targets for calibration and alignment of X-ray based measurement systems
KLA TENCOR CORP2 citations71
US10794839B2Oct 6, 2020
Visualization of three-dimensional semiconductor structures
KLA TENCOR CORP4 citations69