Inventor
YOUSIF IMAD
US29 patents
⚠️ This page may combine multiple inventors who share the name “YOUSIF IMAD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS8988848B2Mar 24, 2015
Extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC47 citations97
US6366346B1Apr 2, 2002
Method and apparatus for optical detection of effluent composition
APPLIED MATERIALS INC89 citations94
US11393710B2Jul 19, 2022
Wafer edge ring lifting solution
APPLIED MATERIALS INC9 citations85
US7967996B2Jun 28, 2011
Process for wafer backside polymer removal and wafer front side photoresist removal
APPLIED MATERIALS INC16 citations84
US7552736B2Jun 30, 2009
Process for wafer backside polymer removal with a ring of plasma under the wafer
APPLIED MATERIALS INC9 citations84
US10204805B2Feb 12, 2019
Thin heated substrate support
APPLIED MATERIALS INC10 citations83
US10163606B2Dec 25, 2018
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC11 citations83
US10008368B2Jun 26, 2018
Multi-zone gas injection assembly with azimuthal and radial distribution control
APPLIED MATERIALS INC10 citations83
US7879183B2Feb 1, 2011
Apparatus and method for front side protection during backside cleaning
APPLIED MATERIALS INC13 citations83
US10825708B2Nov 3, 2020
Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC2 citations73
US9947559B2Apr 17, 2018
Thermal management of edge ring in semiconductor processing
APPLIED MATERIALS INC3 citations73
US11728141B2Aug 15, 2023
Gas hub for plasma reactor
APPLIED MATERIALS INC2 citations72
US11139150B2Oct 5, 2021
Nozzle for multi-zone gas injection assembly
APPLIED MATERIALS INC2 citations72
US6123097ASep 26, 2000
Apparatus and methods for controlling process chamber pressure
APPLIED MATERIALS INC13 citations71
US12094752B2Sep 17, 2024
Wafer edge ring lifting solution
APPLIED MATERIALS INC1 citations62
US11574831B2Feb 7, 2023
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations62
US11177136B2Nov 16, 2021
Abatement and strip process chamber in a dual loadlock configuration
APPLIED MATERIALS INC0 citations62
US11171008B2Nov 9, 2021
Abatement and strip process chamber in a dual load lock configuration
APPLIED MATERIALS INC1 citations62
US11244811B2Feb 8, 2022
Plasma reactor with highly symmetrical four-fold gas injection
APPLIED MATERIALS INC1 citations61
US9330887B2May 3, 2016
Plasma reactor with tiltable overhead RF inductive source
APPLIED MATERIALS INC0 citations52
US10468282B2Nov 5, 2019
Method and apparatus for substrate transfer and radical confinement
APPLIED MATERIALS INC0 citations51
US10410841B2Sep 10, 2019
Side gas injection kit for multi-zone gas injection assembly
APPLIED MATERIALS INC0 citations51
US9464732B2Oct 11, 2016
Apparatus for uniform pumping within a substrate process chamber
APPLIED MATERIALS INC1 citations50