Inventor
ROH YOUNG SEOK
KR5 patents
⚠️ This page may combine multiple inventors who share the name “ROH YOUNG SEOK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS12409404B2Sep 9, 2025
Scrubber system and wet cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US12290778B2May 6, 2025
Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber
SAMSUNG ELECTRONICS CO LTD0 citations52
US11931683B2Mar 19, 2024
Scrubber system and wet cleaning method using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US7040336B2May 9, 2006
Gas delivery system for supplying gas to semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD1 citations47