Inventor

CHI KAIYUAN

KR2 patents

Patents

2 patents

US9672611B2Jun 6, 2017

Pattern analysis method of a semiconductor device

SAMSUNG ELECTRONICS CO LTD2 citations65

US9965851B2May 8, 2018

Method for inspecting pattern and an apparatus for manufacturing a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations33