Inventor
YANG KIHO
KR5 patents
Patents
5 patentsUS10937732B2Mar 2, 2021
Semiconductor devices including contacts and conductive line interfaces with contacting sidewalls
SAMSUNG ELECTRONICS CO LTD2 citations66
US9672611B2Jun 6, 2017
Pattern analysis method of a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations65
US11502033B2Nov 15, 2022
Semiconductor devices including contacts and conductive line interfaces with contacting sidewalls
SAMSUNG ELECTRONICS CO LTD0 citations56
US9476840B2Oct 25, 2016
Methods of inspecting a semiconductor device and semiconductor inspection systems
SAMSUNG ELECTRONICS CO LTD0 citations47
US9965851B2May 8, 2018
Method for inspecting pattern and an apparatus for manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations33