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Inventor
SZALAI LASZLO
US
3 patents
⚠️ This page may combine multiple inventors who share the name “SZALAI LASZLO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
2 patents
US5275303A
Jan 4, 1994
Valve closure mechanism for semiconductor deposition apparatus
APPLIED MATERIALS INC
60 citations
91
US5287725A
Feb 22, 1994
Surface volatile material detector
APPLIED MATERIALS INC
11 citations
69
HIGH YIELD TECHNOLOGY
1 patent
US4804853A
Feb 14, 1989
Compact particle flux monitor
HIGH YIELD TECHNOLOGY
28 citations
89