Inventor
WELING MILIND GANESH
US10 patents
⚠️ This page may combine multiple inventors who share the name “WELING MILIND GANESH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VLSI TECHNOLOGY INC
9 patentsUS5953612ASep 14, 1999
Self-aligned silicidation technique to independently form silicides of different thickness on a semiconductor device
VLSI TECHNOLOGY INC63 citations95
US5952241ASep 14, 1999
Method and apparatus for improving alignment for metal masking in conjuction with oxide and tungsten CMP
VLSI TECHNOLOGY INC24 citations89
US6315645B1Nov 13, 2001
Patterned polishing pad for use in chemical mechanical polishing of semiconductor wafers
VLSI TECHNOLOGY INC16 citations83
US6028013AFeb 22, 2000
Moisture repellant integrated circuit dielectric material combination
VLSI TECHNOLOGY INC17 citations82
US6013558AJan 11, 2000
Silicon-enriched shallow trench oxide for reduced recess during LDD spacer etch
VLSI TECHNOLOGY INC15 citations73
US6196900B1Mar 6, 2001
Ultrasonic transducer slurry dispenser
VLSI TECHNOLOGY INC9 citations72
US6274940B1Aug 14, 2001
Semiconductor wafer, a chemical-mechanical alignment mark, and an apparatus for improving alignment for metal masking in conjunction with oxide and tungsten CMP
VLSI TECHNOLOGY INC10 citations70
US6372522B1Apr 16, 2002
Use of optimized film stacks for increasing absorption for laser repair of fuse links
VLSI TECHNOLOGY INC3 citations62
US5910022AJun 8, 1999
Method and system for tungsten chemical mechanical polishing for unplanarized dielectric surfaces
VLSI TECHNOLOGY INC4 citations61