Inventor
MORGAN III CLIFFORD O
US7 patents
Patents
7 patentsUS6110832AAug 29, 2000
Method and apparatus for slurry polishing
IBM157 citations98
US6276987B1Aug 21, 2001
Chemical mechanical polishing endpoint process control
IBM32 citations92
US6254453B1Jul 3, 2001
Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD system
IBM17 citations83
US6261851B1Jul 17, 2001
Optimization of CMP process by detecting of oxide/nitride interface using IR system
IBM12 citations73
US6506341B2Jan 14, 2003
Chemiluminescence detection apparatus
IBM6 citations69
US6021679AFeb 8, 2000
Probe for slurry gas sampling
IBM11 citations69
US6176765B1Jan 23, 2001
Accumulator for slurry sampling
IBM5 citations59