Inventor
OOBA YOSHIYUKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “OOBA YOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON ANELVA CORP
4 patentsUS7977243B2Jul 12, 2011
Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus
CANON ANELVA CORP37 citations91
US7776751B2Aug 17, 2010
Process for producing silicon compound
CANON ANELVA CORP2 citations61
US7659209B2Feb 9, 2010
Barrier metal film production method
CANON ANELVA CORP2 citations61
US7923374B2Apr 12, 2011
Method and apparatus for production of metal film or the like
CANON ANELVA CORP2 citations60