Inventor
CALDWELL ROGER
US7 patents
⚠️ This page may combine multiple inventors who share the name “CALDWELL ROGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML MASKTOOLS BV
4 patentsUS6312854B1Nov 6, 2001
Method of patterning sub-0.25 lambda line features with high transmission, “attenuated” phase shift masks
ASML MASKTOOLS BV44 citations94
US6623895B2Sep 23, 2003
Hybrid phase-shift mask
ASML MASKTOOLS BV38 citations92
US6482555B2Nov 19, 2002
Method of patterning sub-0.25λ line features with high transmission, “attenuated” phase shift masks
ASML MASKTOOLS BV21 citations91
US6835510B2Dec 28, 2004
Hybrid phase-shift mask
ASML MASKTOOLS BV11 citations73
CYPRESS SEMICONDUCTOR CORP
2 patentsUS6016012AJan 18, 2000
Thin liner layer providing reduced via resistance
CYPRESS SEMICONDUCTOR CORP56 citations93
US5514622AMay 7, 1996
Method for the formation of interconnects and landing pads having a thin, conductive film underlying the plug or an associated contact of via hole
CYPRESS SEMICONDUCTOR CORP75 citations90