Inventor
RYU JOON SUNG
KR5 patents
Patents
5 patentsUS7108922B2Sep 19, 2006
Siloxane-based resin and interlayer insulating film formed using the same
SAMSUNG ELECTRONICS CO LTD10 citations72
US7014917B2Mar 21, 2006
Siloxane-based resin and interlayer insulating film for a semiconductor device made using the same
SAMSUNG ELECTRONICS CO LTD8 citations72
US7374701B2May 20, 2008
Organometallic precursor composition and method of forming metal film or pattern using the same
SAMSUNG ELECTRONICS CO LTD5 citations61
US7071540B2Jul 4, 2006
Siloxane-based resin and a semiconductor interlayer insulating film using the same
SAMSUNG ELECTRONICS CO LTD4 citations61
US7294584B2Nov 13, 2007
Siloxane-based resin and a semiconductor interlayer insulating film using the same
SAMSUNG ELECTRONICS CO LTD0 citations51