Inventor
TAMURA AKITAKE
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TAMURA AKITAKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS7648895B2Jan 19, 2010
Vertical CVD apparatus for forming silicon-germanium film
TOKYO ELECTRON LTD337 citations98
US11117144B2Sep 14, 2021
Cyclone collector
TOKYO ELECTRON LTD3 citations71
US10509029B2Dec 17, 2019
Measurement device and measurement method
TOKYO ELECTRON LTD4 citations71
US10222363B2Mar 5, 2019
Measurement device and measurement method
TOKYO ELECTRON LTD3 citations71
US7211514B2May 1, 2007
Heat-processing method for semiconductor process under a vacuum pressure
TOKYO ELECTRON LTD3 citations62
US7008881B2Mar 7, 2006
Method for forming silicon epitaxial layer
TOKYO ELECTRON LTD4 citations62
US7508518B2Mar 24, 2009
Particle measuring method and particle measuring apparatus
TOKYO ELECTRON LTD2 citations61
US7615163B2Nov 10, 2009
Film formation apparatus and method of using the same
TOKYO ELECTRON LTD5 citations60
US8008211B2Aug 30, 2011
Pattern forming method, semiconductor device manufacturing apparatus and storage medium
TOKYO ELECTRON LTD1 citations51
US8911955B2Dec 16, 2014
Virus detection device and virus detection method
TOKYO ELECTRON LTD0 citations50
US10139334B2Nov 27, 2018
Particulate measurement device
TOKYO ELECTRON LTD0 citations39