Inventor
TSENG TUNG-CHING
TW14 patents
⚠️ This page may combine multiple inventors who share the name “TSENG TUNG-CHING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
9 patentsUS6579151B2Jun 17, 2003
Retaining ring with active edge-profile control by piezoelectric actuator/sensors
TAIWAN SEMICONDUCTOR MFG38 citations91
US9318364B2Apr 19, 2016
Semiconductor device metallization systems and methods
TAIWAN SEMICONDUCTOR MFG3 citations73
US6686284B2Feb 3, 2004
Chemical mechanical polisher equipped with chilled retaining ring and method of using
TAIWAN SEMICONDUCTOR MFG8 citations71
US6930040B2Aug 16, 2005
Method of forming a contact on a silicon-on-insulator wafer
TAIWAN SEMICONDUCTOR MFG2 citations62
US6812069B2Nov 2, 2004
Method for improving semiconductor process wafer CMP uniformity while avoiding fracture
TAIWAN SEMICONDUCTOR MFG5 citations62
US6579150B2Jun 17, 2003
Dual detection method for end point in chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG2 citations61
US7109117B2Sep 19, 2006
Method for chemical mechanical polishing of a shallow trench isolation structure
TAIWAN SEMICONDUCTOR MFG2 citations59
US7297632B2Nov 20, 2007
Scratch reduction for chemical mechanical polishing
TAIWAN SEMICONDUCTOR MFG0 citations48
US7016790B2Mar 21, 2006
In-line hot-wire sensor for slurry monitoring
TAIWAN SEMICONDUCTOR MFG1 citations45
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10121698B2Nov 6, 2018
Method of manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US11315810B2Apr 26, 2022
Apparatus for wafer processing
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations53
US9548241B2Jan 17, 2017
Semiconductor device metallization systems and methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11532459B2Dec 20, 2022
Chemical vapor deposition apparatus with cleaning gas flow guiding member
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50