Inventor

KASAI SHIGERU

JP93 patents

⚠️ This page may combine multiple inventors who share the name “KASAI SHIGERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KASAI SHIGERU

TOKYO ELECTRON LTD

Heating apparatus, heat treatment apparatus, computer program and storage medium

Coaxial type impedance matching device and impedance detecting method for plasma generation

Gas processing apparatus baffle member, and gas processing method

Coaxial type impedance matching device and impedance detecting method for plasma generation

Method and apparatus for temperature control of heater

Temperature measuring system

Film forming device

Testing device

Microwave introducing mechanism, microwave plasma source and microwave plasma processing apparatus

Thermal processing apparatus

Plasma processing apparatus

Plasma processing apparatus

Vacuum processing apparatus

Plasma processing apparatus and shower plate

Antenna for plasma generation, plasma processing apparatus and plasma processing method

Placement stand and electronic device inspecting apparatus

Gas supply method using a gas supply system

Temperature adjustment method for mounting base, inspection device, and mounting base

Silicon heater bonded to a test wafer

Mounting table, and method of manufacturing the mounting table

Temperature control device, temperature control method, and inspection apparatus

Prober

Microwave heating apparatus and processing method

Heat treating device

Magnetron control method, magnetron service life judgment method, microwave generation device, magnetron service life judgment device, processing device, computer program, and storage medium

Plasma processing equipment

Method and device for vacuum treatment

KASAI SHIGERU

Annealing apparatus

Microwave irradiation device and microwave irradiation method

Structure for attaching vibration sensor to storage device

Tuner and microwave plasma source

Annealing apparatus

Film-forming apparatus

IKEDA TARO

Electromagnetic-radiation power-supply mechanism for exciting a coaxial waveguide by using first and second poles and a ring-shaped reflection portion

Surface wave plasma generating antenna and surface wave plasma processing apparatus

JAPAN RADIO CO LTD

Coaxial type impedance matching device and impedance detecting method for plasma generation

Coaxial type impedance matching device

NEC CORP

Micro-machine (MEMS) switch with electrical insulator

Assessing device, assessing system, assessing method, and computer-readable recording medium

TEL VARIAN LIMITED

Semiconductor processing apparatus

Selectable feedback control system

SANKYO SEIKI SEISAKUSHO KK

Coil components and motor using the coil components

Rotary electric machine

TOSHIBA KK

Particle radiation therapy apparatus

Particle beam treatment apparatus

NIDEC SANKYO CORP

Motor

Motor device

SHIMIZU MASAHIRO

Heat treatment apparatus, computer program, and storage medium

YONEDA MASATAKE

Processing equipment for object to be processed

MAEHARA TAKESHI

Device and method for fixing a reactor metering pipe