Inventor
AVILA ANTHONY M
US8 patents
⚠️ This page may combine multiple inventors who share the name “AVILA ANTHONY M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
3 patentsUS9754786B2Sep 5, 2017
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC2 citations72
US9012874B2Apr 21, 2015
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
ENTEGRIS INC3 citations62
US9631778B2Apr 25, 2017
Endpoint determination for capillary-assisted flow control
ENTEGRIS INC0 citations51