Inventor
KITA NAONORI
JP11 patents
⚠️ This page may combine multiple inventors who share the name “KITA NAONORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS10025194B2Jul 17, 2018
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US9513558B2Dec 6, 2016
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US8749759B2Jun 10, 2014
Exposure apparatus, exposure method, and method for producing device
NIKON CORP1 citations61
US7618767B2Nov 17, 2009
Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
NIKON CORP2 citations61
US7706072B2Apr 27, 2010
Optical integrator, illumination optical device, photolithograph, photolithography, and method for fabricating device
NIKON CORP2 citations60
US9581811B2Feb 28, 2017
Method for evaluating and improving pupil luminance distribution, illumination optical system and adjustment method thereof, exposure apparatus, exposure method, and device manufacturing method
NIKON CORP1 citations50
KITA NAONORI
4 patentsUS9389519B2Jul 12, 2016
Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing method
KITA NAONORI2 citations58
US8587764B2Nov 19, 2013
Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method
KITA NAONORI3 citations58
US9122170B2Sep 1, 2015
Transmission optical system, illumination optical system, exposure apparatus, and device manufacturing method
KITA NAONORI0 citations37
US8638420B2Jan 28, 2014
Optical integrator, illuminating optical device, exposure apparatus and device manufacturing method
KITA NAONORI0 citations37