Inventor
MEIJER HENDRICUS JOHANNES MARIA
NL35 patents
⚠️ This page may combine multiple inventors who share the name “MEIJER HENDRICUS JOHANNES MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
22 patentsUS7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9606448B2Mar 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9927711B2Mar 27, 2018
Actuation mechanism, optical apparatus and lithography apparatus
ASML NETHERLANDS BV3 citations68
US7514186B2Apr 7, 2009
System for electrically connecting a mask to earth, a mask
ASML NETHERLANDS BV7 citations68
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7889321B2Feb 15, 2011
Illumination system for illuminating a patterning device and method for manufacturing an illumination system
ASML NETHERLANDS BV2 citations63
US7960074B2Jun 14, 2011
Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus
ASML NETHERLANDS BV6 citations62
US10788755B2Sep 29, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10678139B2Jun 9, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10261428B2Apr 16, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10191389B2Jan 29, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10146142B2Dec 4, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9442388B2Sep 13, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10180629B2Jan 15, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US7528935B2May 5, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV0 citations51
US7426015B2Sep 16, 2008
Device manufacturing method and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US8344341B2Jan 1, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
LOF JOERI
10 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9195153B2Nov 24, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9057967B2Jun 16, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US9152058B2Oct 6, 2015
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
LOF JOERI0 citations51