Inventor
VAN SCHAIK FRANK
NL22 patents
⚠️ This page may combine multiple inventors who share the name “VAN SCHAIK FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US6583858B2Jun 24, 2003
Substrate holder for lithographic apparatus
ASML NETHERLANDS BV15 citations77
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US10788755B2Sep 29, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10678139B2Jun 9, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10261428B2Apr 16, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10191389B2Jan 29, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10180629B2Jan 15, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
LOF JOERI
8 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9057967B2Jun 16, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US9152058B2Oct 6, 2015
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
LOF JOERI0 citations51