Inventor
SENGERS TIMOTHEUS FRANCISCUS
NL60 patents
⚠️ This page may combine multiple inventors who share the name “SENGERS TIMOTHEUS FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
37 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US9134622B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV9 citations92
US7907255B2Mar 15, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV13 citations92
US7184122B2Feb 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US7450217B2Nov 11, 2008
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV16 citations89
US10345712B2Jul 9, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9952515B2Apr 24, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations84
US9804509B2Oct 31, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9594308B2Mar 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9213247B2Dec 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9134623B2Sep 15, 2015
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US10025204B2Jul 17, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations83
US9316919B2Apr 19, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations83
US7282701B2Oct 16, 2007
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV12 citations81
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10146143B2Dec 4, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US8035798B2Oct 11, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations73
US7542127B2Jun 2, 2009
Lithographic apparatus and method for manufacturing a device
ASML NETHERLANDS BV7 citations71
US7453078B2Nov 18, 2008
Sensor for use in a lithographic apparatus
ASML NETHERLANDS BV8 citations71
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7619747B2Nov 17, 2009
Lithographic apparatus, analyzer plate, subassembly, method of measuring a parameter of a projection system and patterning device
ASML NETHERLANDS BV2 citations63
US11003096B2May 11, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations62
US9568841B2Feb 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US7924406B2Apr 12, 2011
Stage apparatus, lithographic apparatus and device manufacturing method having switch device for two illumination channels
ASML NETHERLANDS BV3 citations60
US10788755B2Sep 29, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10678139B2Jun 9, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10444644B2Oct 15, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10261428B2Apr 16, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10191389B2Jan 29, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
LOF JOERI
8 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9057967B2Jun 16, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
STREEFKERK BOB
2 patentsSENGERS TIMOTHEUS FRANCISCUS
2 patentsLOOPSTRA ERIK ROELOF
1 patentShowing the top 50 of 60 patents by PatentIndex Score.