Inventor
SIMON KLAUS
NL85 patents
⚠️ This page may combine multiple inventors who share the name “SIMON KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
35 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7081943B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV199 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7738074B2Jun 15, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations98
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7038760B2May 2, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV78 citations98
US7936444B2May 3, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV35 citations96
US7359030B2Apr 15, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV92 citations96
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US7676088B2Mar 9, 2010
Imprint lithography
ASML NETHERLANDS BV13 citations93
US7517211B2Apr 14, 2009
Imprint lithography
ASML NETHERLANDS BV27 citations92
US7507675B2Mar 24, 2009
Device manufacturing method and device
ASML NETHERLANDS BV22 citations86
US9798246B2Oct 24, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations84
US9477160B2Oct 25, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9383655B2Jul 5, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US8011915B2Sep 6, 2011
Imprint lithography
ASML NETHERLANDS BV7 citations84
US7878791B2Feb 1, 2011
Imprint lithography
ASML NETHERLANDS BV14 citations84
US7636475B2Dec 22, 2009
Imprint lithography
ASML NETHERLANDS BV8 citations84
US10656538B2May 19, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US9610727B2Apr 4, 2017
Imprint lithography
ASML NETHERLANDS BV2 citations72
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US9864271B2Jan 9, 2018
Imprint lithography
ASML NETHERLANDS BV1 citations63
LOF JOERI
6 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
ASML HOLDING NV
4 patentsUS6867844B2Mar 15, 2005
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV407 citations99
US7411650B2Aug 12, 2008
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV14 citations92
US8004649B2Aug 23, 2011
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV4 citations74
US9715178B2Jul 25, 2017
Immersion photolithography system and method using microchannel nozzles
ASML HOLDING NV1 citations63
VOGEL HERMAN
2 patentsMASCHF AUGSBURG NUERNBERG AG
1 patentKRUIJT-STEGEMAN YVONNE WENDELA
1 patentSTREEFKERK BOB
1 patentShowing the top 50 of 85 patents by PatentIndex Score.