Inventor
DE SMIT JOANNES THEODOOR
NL48 patents
⚠️ This page may combine multiple inventors who share the name “DE SMIT JOANNES THEODOOR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
33 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7193232B2Mar 20, 2007
Lithographic apparatus and device manufacturing method with substrate measurement not through liquid
ASML NETHERLANDS BV216 citations99
US7081943B2Jul 25, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV199 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7482611B2Jan 27, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV65 citations98
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7317504B2Jan 8, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV114 citations98
US7684008B2Mar 23, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV58 citations95
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7795603B2Sep 14, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations93
US7459247B2Dec 2, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV34 citations90
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
US7116404B2Oct 3, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations84
US7477403B2Jan 13, 2009
Optical position assessment apparatus and method
ASML NETHERLANDS BV8 citations82
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7274029B2Sep 25, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations63
US8363208B2Jan 29, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations62
US10788755B2Sep 29, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10678139B2Jun 9, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10261428B2Apr 16, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10222706B2Mar 5, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10191389B2Jan 29, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US10180629B2Jan 15, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9964858B2May 8, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US8344341B2Jan 1, 2013
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations49
LOF JOERI
12 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US9482966B2Nov 1, 2016
Lithographic apparatus and device manufacturing method
LOF JOERI12 citations84
US8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
US9541843B2Jan 10, 2017
Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquid
LOF JOERI0 citations52
US9195153B2Nov 24, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US9081299B2Jul 14, 2015
Lithographic apparatus and device manufacturing method involving removal of liquid entering a gap
LOF JOERI0 citations52
US9057967B2Jun 16, 2015
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US8208120B2Jun 26, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI0 citations52
US9152058B2Oct 6, 2015
Lithographic apparatus and device manufacturing method involving a member and a fluid opening
LOF JOERI0 citations51