Inventor
VAN SANTEN HELMAR
NL88 patents
⚠️ This page may combine multiple inventors who share the name “VAN SANTEN HELMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
34 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7394521B2Jul 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV160 citations99
US7388648B2Jun 17, 2008
Lithographic projection apparatus
ASML NETHERLANDS BV136 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7050146B2May 23, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV165 citations99
US6952253B2Oct 4, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1,825 citations99
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7119874B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV143 citations98
US7411653B2Aug 12, 2008
Lithographic apparatus
ASML NETHERLANDS BV49 citations96
US9740107B2Aug 22, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations93
US9366972B2Jun 14, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations93
US7982850B2Jul 19, 2011
Immersion lithographic apparatus and device manufacturing method with gas supply
ASML NETHERLANDS BV14 citations93
US7418902B2Sep 2, 2008
Imprint lithography including alignment
ASML NETHERLANDS BV24 citations93
US7898642B2Mar 1, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV19 citations92
US7868998B2Jan 11, 2011
Lithographic apparatus
ASML NETHERLANDS BV9 citations92
US7618250B2Nov 17, 2009
Imprint lithography
ASML NETHERLANDS BV22 citations92
US7354698B2Apr 8, 2008
Imprint lithography
ASML NETHERLANDS BV26 citations89
US10527955B2Jan 7, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV4 citations84
US9817321B2Nov 14, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9684250B2Jun 20, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9465301B2Oct 11, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations84
US9091940B2Jul 28, 2015
Lithographic apparatus and method involving a fluid inlet and a fluid outlet
ASML NETHERLANDS BV5 citations84
USRE42849EOct 18, 2011
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations84
US7692771B2Apr 6, 2010
Imprint lithography
ASML NETHERLANDS BV7 citations74
US10503084B2Dec 10, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10234768B2Mar 19, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations73
US9829799B2Nov 28, 2017
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations73
US10620545B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations71
US10962891B2Mar 30, 2021
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations63
US7710541B2May 4, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7708924B2May 4, 2010
Imprint lithography
ASML NETHERLANDS BV2 citations63
US7611348B2Nov 3, 2009
Imprint lithography
ASML NETHERLANDS BV5 citations63
KONINKL PHILIPS ELECTRONICS NV
7 patentsUS7514699B2Apr 7, 2009
Method and device for irradiating spots on a layer
KONINKL PHILIPS ELECTRONICS NV74 citations98
US7399978B2Jul 15, 2008
Method and device for irradiating spots on a layer
KONINKL PHILIPS ELECTRONICS NV62 citations98
US6396637B2May 28, 2002
Image display device and method of manufacturing a light conductor for such an image display device
KONINKL PHILIPS ELECTRONICS NV151 citations97
US7358507B2Apr 15, 2008
Liquid removal in a method and device for irradiating spots on a layer
KONINKL PHILIPS ELECTRONICS NV31 citations93
US6649093B2Nov 18, 2003
Method of manufacturing an optically scannable information carrier
KONINKL PHILIPS ELECTRONICS NV43 citations92
US6550941B1Apr 22, 2003
Luminaire
KONINKL PHILIPS ELECTRONICS NV13 citations84
US6568841B2May 27, 2003
Illumination unit for a device having a multi-color reflective liquid crystal display
KONINKL PHILIPS ELECTRONICS NV7 citations73
LOF JOERI
5 patentsUS8482845B2Jul 9, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI32 citations96
US8154708B2Apr 10, 2012
Lithographic apparatus and device manufacturing method
LOF JOERI23 citations92
US8797503B2Aug 5, 2014
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure
LOF JOERI5 citations84
US8472002B2Jun 25, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI7 citations84
US8558989B2Oct 15, 2013
Lithographic apparatus and device manufacturing method
LOF JOERI3 citations74
HOOGENDAM CHRISTIAAN ALEXANDER
1 patentBETTING MARCO
1 patentGEERS HENRICUS ABRAHAM
1 patentVAN SANTEN HELMAR
1 patentShowing the top 50 of 88 patents by PatentIndex Score.