Inventor

MEBARKI BENCHERKI

US36 patents

⚠️ This page may combine multiple inventors who share the name “MEBARKI BENCHERKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MEBARKI BENCHERKI

APPLIED MATERIALS INC

Self-aligned interconnects formed using substractive techniques

Self aligned double patterning flow with non-sacrificial features

Seam-healing method upon supra-atmospheric process in diffusion promoting ambient

Methods of forming metal silicide layers and metal silicide layers formed therefrom

Seam-healing method upon supra-atmospheric process in diffusion promoting ambient

Self-aligned interconnects formed using subtractive techniques

Methods for forming a metal silicide interconnection nanowire structure

Direct deposition of nickel silicide nanowire

Selective oxidation and simplified pre-clean

Method of forming a bottom isolation dielectric by directional sputtering of a capping layer over a pair of stacks

Methods for forming a metal silicide interconnection nanowire structure

Microwave anneal to improve CVD metal gap-fill and throughput

Method for critical dimension reduction using conformal carbon films

Integrated methods for graphene formation

Method and apparatus for asymmetric selective physical vapor deposition

Electrochemical reduction of surface metal oxides

PVD directional deposition for encapsulation

Film quality control in a linear scan physical vapor deposition process

Methods and apparatus for patterning substrates using asymmetric physical vapor deposition

Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning

Methods for forming 2-dimensional self-aligned vias

Conformal strippable carbon film for line-edge-roughness reduction for advanced patterning

Metal silicide formation through an intermediate metal halogen compound

Methods and apparatus for patterning substrates using asymmetric physical vapor deposition

Methods for asymmetric deposition of metal on high aspect ratio nanostructures

Methods and apparatus for processing a substrate

Methods and apparatus for producing low angle depositions

Method and apparatus of low temperature plasma enhanced chemical vapor deposition of graphene

Low thermal budget crystallization of amorphous metal silicides

Apparatus and method of damage mitigation and step coverage enhancement

Silicide phase control by confinement

Laminate and core shell formation of silicide nanowire

MEBARKI BENCHERKI

Self-aligned multi-patterning for advanced critical dimension contacts

Ammonia-based plasma treatment for metal fill in narrow features

THREE TEC CO LTD

Object processing apparatus and plasma facility comprising the same

HAN XINHAI

High mobility monolithic p-i-n diodes