Inventor
WESTERLAKEN JAN STEVEN CHRISTIAAN
NL28 patents
⚠️ This page may combine multiple inventors who share the name “WESTERLAKEN JAN STEVEN CHRISTIAAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
26 patentsUS9507275B2Nov 29, 2016
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations83
US11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US10747125B2Aug 18, 2020
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations72
US10120292B2Nov 6, 2018
Support apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations72
US10191393B2Jan 29, 2019
Lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV3 citations71
US9529277B2Dec 27, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations71
US9513568B2Dec 6, 2016
Lithographic apparatus
ASML NETHERLANDS BV2 citations61
US10495985B2Dec 3, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations58
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US11982947B2May 14, 2024
Contamination trap
ASML NETHERLANDS BV0 citations56
US11556067B2Jan 17, 2023
Contamination trap
ASML NETHERLANDS BV1 citations56
US12235585B2Feb 25, 2025
Radiation conduit
ASML NETHERLANDS BV0 citations53
US10191395B2Jan 29, 2019
Thermal conditioning unit, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations52
US9891541B2Feb 13, 2018
Thermal conditioning unit, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations52
US10788763B2Sep 29, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10620553B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10216102B2Feb 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9891542B2Feb 13, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9785060B2Oct 10, 2017
Stage system and lithographic apparatus comprising such stage system
ASML NETHERLANDS BV0 citations49
US10114295B2Oct 30, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9971254B2May 15, 2018
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US9753382B2Sep 5, 2017
Sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations48
US10133197B2Nov 20, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36
US10031428B2Jul 24, 2018
Gas flow optimization in reticle stage environment
ASML NETHERLANDS BV0 citations35
US10114298B2Oct 30, 2018
Conditioning system and lithographic apparatus comprising a conditioning system
ASML NETHERLANDS BV0 citations32
US10095130B2Oct 9, 2018
Lithographic apparatus and method in a lithographic process
ASML NETHERLANDS BV0 citations28