Inventor
STEIJAERT PETER PAUL
NL12 patents
⚠️ This page may combine multiple inventors who share the name “STEIJAERT PETER PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7791709B2Sep 7, 2010
Substrate support and lithographic process
ASML NETHERLANDS BV11 citations82
US9529277B2Dec 27, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations71
US10620553B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10216102B2Feb 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9891542B2Feb 13, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US7656502B2Feb 2, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10175585B2Jan 8, 2019
Lithographic apparatus and a method of operating the apparatus
ASML NETHERLANDS BV0 citations48
STEIJAERT PETER PAUL
3 patentsUS8687166B2Apr 1, 2014
Lithographic apparatus having an encoder position sensor system
STEIJAERT PETER PAUL3 citations59
US8836913B2Sep 16, 2014
Lithographic apparatus having an encoder type position sensor system
STEIJAERT PETER PAUL0 citations46
US8760615B2Jun 24, 2014
Lithographic apparatus having encoder type position sensor system
STEIJAERT PETER PAUL0 citations46