Inventor

VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS

NL67 patents

⚠️ This page may combine multiple inventors who share the name “VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS

ASML NETHERLANDS BV

Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object

Optical device and associated system

Cyclic error measurements and calibration procedures in interferometers

Lithographic apparatus

Lithographic apparatus and sensor calibration method

Substrate positioning system, lithographic apparatus and device manufacturing method

Metrology apparatus

Metrology apparatus

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Interferometer system, method of determining a mode hop of a laser source of an interferometer system, method of determining a position of a movable object, and lithographic apparatus

Lithographic apparatus, and patterning device for use in a lithographic process

Metrology apparatus

Lithographic apparatus

Lithographic apparatus

Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless

Lithographic method and apparatus

Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system

Interferometric stage positioning apparatus

Lithographic apparatus

Position measurement system and lithographic apparatus

Stage apparatus, lithographic apparatus and method of positioning an object table

Lithographic apparatus

Imprint apparatus with movable stages

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Stage apparatus, lithographic apparatus and method of positioning an object table

VAN EIJK JAN

Positioning system, lithographic apparatus and method

Lithographic apparatus, and patterning device for use in a lithographic process

System for detecting motion, lithographic apparatus and device manufacturing method

BUTLER HANS

Position measurement system and lithographic apparatus

Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system

ZEISS CARL SMT GMBH

Position measurement of optical elements in a lithographic apparatus

Position measurement of optical elements in a lithographic apparatus

KOENEN WILLEM HERMAN GERTRUDA ANNA

Position measurement system, lithographic apparatus and device manufacturing method

Stage system, lithographic apparatus including such stage system, and correction method

WESTERLAKEN JAN STEVEN CHRISTIAAN

Lithographic apparatus and device manufacturing method

VAN DE MAST FRANCISCUS

Method of updating calibration data and a device manufacturing method

AARTS IGOR MATHEUS PETRONELLA

Lithographic apparatus and device manufacturing method

LOOPSTRA ERIK ROELOF

Lithographic projection apparatus and method for controlling a support structure

STEIJAERT PETER PAUL

Lithographic apparatus having an encoder position sensor system

HUANG YANG-SHAN

Lithographic apparatus, method of deforming a substrate table and device manufacturing method

KLAVER RENATUS GERARDUS

Displacement measurement system having a prism, for displacement measurement between two or more gratings

EUSSEN EMIEL JOZEF MELANIE

Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system

BEERENS RUUD ANTONIUS CATHARINA MARIA

Lithographic apparatus and device manufacturing method