Inventor
VAN DE MAST FRANCISCUS
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VAN DE MAST FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS7511797B2Mar 31, 2009
Lithography system, control system and device manufacturing method
ASML NETHERLANDS BV9 citations82
US7352439B2Apr 1, 2008
Lithography system, control system and device manufacturing method
ASML NETHERLANDS BV10 citations81
US9529277B2Dec 27, 2016
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV3 citations71
US7804582B2Sep 28, 2010
Lithographic apparatus, method of calibrating a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations60
US10620553B2Apr 14, 2020
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US10216102B2Feb 26, 2019
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50
US9891542B2Feb 13, 2018
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations50