Inventor
GATTOBIGIO GIOVANNI LUCA
NL26 patents
Patents
26 patentsUS10416571B2Sep 17, 2019
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV4 citations82
US11231653B2Jan 25, 2022
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10969695B2Apr 6, 2021
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US10216100B2Feb 26, 2019
Inspection substrate and an inspection method
ASML NETHERLANDS BV2 citations69
US12429778B2Sep 30, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11614689B2Mar 28, 2023
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12529964B2Jan 20, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US12242200B2Mar 4, 2025
Lithography apparatus and a method of manufacturing a device
ASML NETHERLANDS BV0 citations59
US11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11774857B2Oct 3, 2023
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11720032B2Aug 8, 2023
Process tool and an inspection method
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11372336B2Jun 28, 2022
Lithography apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11809086B2Nov 7, 2023
Fluid handling structure, a lithographic apparatus, a method of using a fluid handling structure and a method of using a lithographic apparatus
ASML NETHERLANDS BV0 citations58
US11156921B2Oct 26, 2021
Fluid handling structure, lithographic apparatus, and method of using a fluid handling structure
ASML NETHERLANDS BV0 citations58
US11086239B2Aug 10, 2021
Cleaning device and method of cleaning
ASML NETHERLANDS BV0 citations55
US11372339B1Jun 28, 2022
Device manufacturing method and computer program
ASML NETHERLANDS BV0 citations53
US12566382B2Mar 3, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10725390B2Jul 28, 2020
Inspection substrate and an inspection method
ASML NETHERLANDS BV0 citations48
US10317804B2Jun 11, 2019
Substrate table, lithographic apparatus and method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations48
US10571810B2Feb 25, 2020
Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
ASML NETHERLANDS BV0 citations47
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10095129B2Oct 9, 2018
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus
ASML NETHERLANDS BV0 citations40