Inventor
FUJIMOTO KAZUKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “FUJIMOTO KAZUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
11 patentsUS6198202B1Mar 6, 2001
Vibration actuator
CANON KK23 citations92
US6107724AAug 22, 2000
Vibration wave driving device and apparatus having the same
CANON KK20 citations92
US5949178ASep 7, 1999
Vibration wave driving apparatus and a vibration member, and manufacturing method of the apparatus and the member
CANON KK30 citations92
US5760529AJun 2, 1998
Vibration wave actuator and system using the same
CANON KK25 citations92
US5739623AApr 14, 1998
Vibration wave driven motor
CANON KK18 citations83
US5684353ANov 4, 1997
Vibration driven motor
CANON KK17 citations73
US7518132B2Apr 14, 2009
Light source apparatus, exposure apparatus and device fabrication method
CANON KK3 citations62
US7619233B2Nov 17, 2009
Light source
CANON KK3 citations61
US7080563B2Jul 25, 2006
Gas flow measurement apparatus and method for EVU light source
CANON KK6 citations61
US7697112B2Apr 13, 2010
Exposure apparatus and device manufacturing method
CANON KK1 citations51
US7170579B2Jan 30, 2007
Light source unit, exposure apparatus, and device manufacturing method
CANON KK0 citations51