Inventor
TSUJIHASHI TATSUHIKO
JP5 patents
Patents
5 patentsUS12074048B2Aug 27, 2024
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations58
USD1012311SJan 23, 2024
Holding pad for carrying substrate
TOKYO ELECTRON LTD1 citations57
USD1011550SJan 16, 2024
Holding pad for carrying substrate
TOKYO ELECTRON LTD1 citations57
US12312184B2May 27, 2025
Substrate transfer device and substrate transfer method
TOKYO ELECTRON LTD0 citations47
US11476143B2Oct 18, 2022
Substrate processing apparatus and substrate receptacle storage method
TOKYO ELECTRON LTD0 citations47