Inventor
IDE KOUSEI
JP7 patents
Patents
7 patentsUS11705359B2Jul 18, 2023
Substrate transfer mechanism and substrate transferring method
TOKYO ELECTRON LTD5 citations83
US11978655B2May 7, 2024
Substrate transfer mechanism and substrate transferring method
TOKYO ELECTRON LTD2 citations71
US12368069B2Jul 22, 2025
Substrate transfer device including housing provided with fan
TOKYO ELECTRON LTD0 citations60
US12391472B2Aug 19, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations50
US12557591B2Feb 17, 2026
Linearly moving mechanism and method of suppressing particle scattering
TOKYO ELECTRON LTD0 citations47
US12381102B2Aug 5, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations47
US11476143B2Oct 18, 2022
Substrate processing apparatus and substrate receptacle storage method
TOKYO ELECTRON LTD0 citations47