Inventor
SATOH NAOYUKI
JP26 patents
⚠️ This page may combine multiple inventors who share the name “SATOH NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10622196B2Apr 14, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD341 citations99
US7867926B2Jan 11, 2011
Substrate processing apparatus and method
TOKYO ELECTRON LTD137 citations97
US10566175B2Feb 18, 2020
Focus ring and plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US9818583B2Nov 14, 2017
Electrode plate for plasma etching and plasma etching apparatus
TOKYO ELECTRON LTD2 citations73
US7641806B2Jan 5, 2010
Manufacturing method for membrane member
TOKYO ELECTRON LTD6 citations63
US11676847B2Jun 13, 2023
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11508603B2Nov 22, 2022
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11217470B2Jan 4, 2022
Substrate placing table and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US8715782B2May 6, 2014
Surface processing method
TOKYO ELECTRON LTD0 citations52
US7473567B2Jan 6, 2009
Change rate prediction method, storage medium, and substrate processing system
TOKYO ELECTRON LTD0 citations41
US9812297B2Nov 7, 2017
Method of affixing heat transfer sheet
TOKYO ELECTRON LTD0 citations34
SATOH NAOYUKI
6 patentsUS9117635B2Aug 25, 2015
Electrode plate for plasma etching and plasma etching apparatus
SATOH NAOYUKI11 citations83
US8135240B2Mar 13, 2012
Image searching device, method and recording medium
SATOH NAOYUKI13 citations83
US11402198B2Aug 2, 2022
Information processing device, biological information measurement device, and computer-readable medium
SATOH NAOYUKI0 citations61
US8175419B2May 8, 2012
Image search apparatus, image search method, and storage medium storing a program for causing a search apparatus to execute a search method
SATOH NAOYUKI2 citations61
US8318034B2Nov 27, 2012
Surface processing method
SATOH NAOYUKI0 citations51
US8149239B2Apr 3, 2012
Image processing apparatus, image processing method, and storage medium storing a program for causing an image processing apparatus to execute an image processing method
SATOH NAOYUKI0 citations40
NIPPON TUNGSTEN
2 patentsUS11548827B2Jan 10, 2023
Member for plasma processing apparatus and plasma processing apparatus with the same
NIPPON TUNGSTEN0 citations62
US11434174B2Sep 6, 2022
Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body
NIPPON TUNGSTEN1 citations62