Inventor
CHANG CHUN-LIN LOUIS
TW15 patents
Patents
15 patentsUS10524345B2Dec 31, 2019
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US10429729B2Oct 1, 2019
EUV radiation modification methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations84
US10718718B2Jul 21, 2020
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations83
US11419203B2Aug 16, 2022
EUV radiation modification methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10980100B2Apr 13, 2021
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10917959B2Feb 9, 2021
EUV radiation modification methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US10429314B2Oct 1, 2019
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11737200B2Aug 22, 2023
Residual gain monitoring and reduction for EUV drive laser
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11723141B2Aug 8, 2023
EUV radiation generation methods and systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11092555B2Aug 17, 2021
EUV vessel inspection method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12347997B2Jul 1, 2025
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11973302B2Apr 30, 2024
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11588293B2Feb 21, 2023
Methods and systems for aligning master oscillator power amplifier systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10310380B2Jun 4, 2019
High-brightness light source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10506698B2Dec 10, 2019
EUV source generation method and related system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49