Inventor
KOKKO KALEVI
FI4 patents
Patents
4 patentsUS11646193B2May 9, 2023
Manufacturing of foreign oxide or foreign nitride on semiconductor
TURUN YLIOPISTO0 citations56
US11615952B2Mar 28, 2023
Manufacturing of foreign oxide or foreign nitride on semiconductor
TURUN YLIOPISTO0 citations56
US11923236B2Mar 5, 2024
Silicon-on-insulator with crystalline silicon oxide
TURUN YLIOPISTO0 citations53
US11443977B2Sep 13, 2022
Silicon-on-insulator with crystalline silicon oxide
TURUN YLIOPISTO1 citations53